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Smart Cut® is a patented liquid-phase etching technology developed and used by Soitec. Smart Cut® is a proprietary version of ICP-RIE. With Smart Cut® we have improved some of the main processes of conventional ICP-RIE.
Smart Cut is used for very high volume processing of large thin wafers. Smart Cut is a continuous process. It is also used for batch processing of medium size wafers.
Smart Cut uses either inductively coupled radio frequency (RF) or microwave (MW) energy. The energy is coupled to the wafer through a high-density plasma. The RF and MW energy is used to neutralize the wafer .
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There can be 6 cells/layers in Smart Cut. The primary goal of Smart Cut is to etch the SiC structure with a minimum residue on the wafer surface.
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SmartCut Pro (eurocut6.exe). SmartCut Pro 2.0 is the latest version of the SmartCut Pro cutting and vectorization software. This new version of .
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