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Hydrogen charging station, Paris-Charles-de-Gaulle airport, France.A chemically amplified positive-working resist composition used as a resist for semiconductor microfabrication contains an acid-generator, and upon exposure to radiation, generates an acid in exposed areas. A chemically amplified positive-working resist composition is used in the microfabrication of semiconductors, and is required to form good patterns having high sensitivity and resolution.
A chemically amplified positive-working resist composition conventionally used in the microfabrication of semiconductor includes a resin having a structure in which an acid-labile group protected with an acid-labile group protective group that can be eliminated by an acid (hereinafter, sometimes referred to as “acid-labile group”), and an acid-generator that generates an acid upon exposure to radiation are copolymerized. A radiation-sensitive acid generator disclosed in Patent Document 1 has been known.
In recent years, an attempt has been made to make the line width of a resist pattern have a smaller size. The smaller the size of the resist pattern is, the lower the resolution of the pattern is. Particularly, when the line width of a resist pattern reaches from 150 nm to 100 nm, a pattern having a resolution of approximately 60 nm is required, and the resolution is greatly low. For example, for this reason, a chemically amplified positive-working resist composition has been required to have a resolution of approximately 50 nm.
Here, in a case where a polyhydroxystyrene resin (e.g., poly(p-hydroxystyrene)) or a resin having a poly(p-hydroxystyrene) structure is used as a resin having an acid-labile group, it is difficult to form a pattern having a high resolution. This is because the exposed area undergoes deprotection where an acid-labile group is removed by an acid, and the un-exposed area is swollen, thereby causing a blur of the pattern.
Here, as a resin having an acid-labile group, a resin having an acid-labile group having an ether bond that can be cleaved by an acid can be exemplified. In addition, a resin having a hydroxysty

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